Archives of Acoustics, 33, 3, pp. 293–302, 2008

Scanning Acoustic Microscope for 3D imaging

Krzysztof DYNOWSKI
Institute of Fundamental Technological Research, Polish Academy of Sciences

Jerzy LITNIEWSKI
Institute of Fundamental Technological Research, Polish Academy of Sciences

Andrzej NOWICKI
Institute of Fundamental Technological Research, Polish Academy of Sciences

A new Acoustic Microscope operating at the frequency up to
200 MHz and allowing for visualization of the internal structures of materials
was developed. The system was built basing on the commercially available
components and the self-designed acoustic lenses. The dedicated software was
developed to control the process of 3D RF-data acquisition, processing and
presenting in 2D cross-sections or 3D surface rendering mode. This article
describes the technical principles of the constructed microscope and presents
the reconstructed images of the designed test-probe and of the integrated
circuit.
Keywords: Acoustic Microscopy; SAM; 3D imaging; rendering; subsurface imaging
Full Text: PDF


Copyright © Polish Academy of Sciences & Institute of Fundamental Technological Research (IPPT PAN)