Numerical Analysis of Sensitivity of SAW Structure to the Effect of Toxic Gases
Numerical results for the effect of gas CH4 on layers: WO3, TiO2, NiO, SnO2 in the steady state and CH4 in the non-steady state in recovery step in the WO3 sensing layer have been shown. The main aim of the investigation was to study thin film interaction with target gases in the SAW sensor configuration based on simple reaction-diffusion equation.
The results of the numerical analysis allow to select the sensor design conditions, including the morphology of the sensor layer, its thickness, operating temperature, and layer type. The numerical results basing on the code elaborated numerical system (written in Python language), were analysed. The theoretical results were verified and confirmed experimentally.
HEJCZYK T., URBANCZYK M. (2011), WO3-Pd Structure in SAW Sensor Hydrogen Detection, Acta Physica Polonica A, 120, 4, 616-620.
HEJCZYK T., URBANCZYK M., JAKUBIK W., (2010), Analytical Model of Semiconductor Sensor Layers in SAW Gas Sensors, Acta Physica Polonica A, 118, 6, 1148-1152.
HEJCZYK T., URBANCZYK M., PUSTELNY T., JAKUBIK W., (2015) Numerical and Experimental Analysis of the Response of a SAW Structure with WO3 layers an Action of Carbon Monoxide, Archives of Acoustics, 40, 1, 19-24.
HEJCZYK T., URBANCZYK M., WITULA R., MACIAK E., (2012), SAW sensors for detection of hydrocarbons. Numerical analysis and experimental results, Bulletin of the Polish Academy of Sciences: Technical Sciences, 60, 3, 589-595.
JASEK K., MILUSKI W., PASTERNAK M. (2011), New approach to saw gas sensors array response measurement, Acta Physica Polonica A, 120, 4, 639-641.
JASEK K., NEFFE S., PASTERNAK M. (2012), SAW sensor for mercury vapour detection, Acta Physica Polonica A, 122, 5, 825-828.
KAWALEC A., PASTERNAK M. (2008), Microwave humidity sensor based on surface acoustic wave resonator with nafion layer, IEEE Transactions on Instrumentation and Measurement, 9, 57, 2019-2023.
KAWALEC A., PASTERNAK M., JASEK K.,(2008), Measurements results of SAW humidity sensor with nafion layer, European Physical Journal: Special Topics, 154, 121-126.
MATSUMAGA N., SAKAI G., SHIMONOE K., YAMAZOE N., (2001), Diffusion equation-based study of thin film semiconductor gas sensor-response transient, Sensors and Actuators B, 83, 216-221.
MATSUMAGA N., SAKAI G., SHIMONOE K., YAMAZOE N., (2003), Formulation of gas diffusion dynamics for thin film semiconductor gas sensor based on simple reaction-diffusion equation, Sensors and Actuators B, 96, 226-233.
PORTER J., HILAL H.S., (2004), Thermodynamic correlations and band gap calculations in metal oxides, Elsevier, Progress in Solid State Chemistry 32, pp. 207-217.
PUSTELNY B., PUSTELNY T. (2009), Transverse acoustoelectric effect applying in surface study of GaP:Te(111), Acta Physica Polonica A, 116, 3, 383-384.
URBANCZYK M. (2011), Analytical model of a SAW gas sensor, WIT Transactions on Computational Methods and Experimental Measurements, Proceedings of the CMEM11, WIT Press Southampton, 48, 229-239.
URBANCZYK M., Gas Sensors on the base of Surface Acoustic Wave. (2011) Monograph, Edited by SUT, Gliwice, 213 (in Polish).
URBANCZYK M., HEJCZYK T. (2011), Analysis of non-steady state in SAW gas sensors with semiconducting sensor layers, Acta Physica Polonica A, 120, 4, 789-793.
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